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PDC-00Q Quartz Chamber
ConsumablesInstrumentation

PDC-00Q Quartz Chamber

By Harrick Plasma

PDC-00Q for our Expanded Plasma Cleaners - Purchase of the plasma cleaner includes a Pyrex chamber - Pyrex is sufficient for most plasma cleaning applications of glass slides, silicon wafers, and polymers - An optional quartz chamber substitution is recommended for use with fluorinated gases (e.g. CF 4) and for samples or applications that are very sensitive to the elements that make up the chemical composition of Pyrex (borosilicate glass)

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Vacuum Gauge & digital meter

PDC-VCG (115V) | PDC-VCG-2 (230V) The optional PDC-VCG provides a vacuum gauge and digital meter as a stand-alone accessory and may be used with any of our plasma cleaner models. The ability to monitor vacuum pressure during plasma processing is beneficial for process repeatability and consistency. Features - Thermocouple vacuum gauge sensor connects to plasma cleaner door - Digital meter displays pressure range of 1 mTorr to 760 Torr - ¼” OD hose adapter included to connect gas line to metering valve on plasma cleaner door - Weight: 5 lbs | Size: 5″ H x 10″ W x 8″ D

PDC-00T Quartz Sample Tray

PDC-00T Quartz | PDC-00T-P Pyrex 5.5″ W x 6.5″ L for our Expanded Plasma Cleaners - Sample trays provide a horizontal surface for loading and unloading of small samples and for batch processing - Quartz is recommended as it is purely SiO2 and is a more stable material to use for plasma processing

PDC-00T-P Pyrex Sample Tray

PDC-00T Quartz | PDC-00T-P Pyrex 5.5″ W x 6.5″ L for our Expanded Plasma Cleaners - Sample trays provide a horizontal surface for loading and unloading of small samples and for batch processing - Pyrex sample trays are a more affordable option and sufficient for most plasma cleaning applications

Sample Trays and Chambers

QUARTZ | PYREX Sample trays simplify loading and unloading of small samples and batch processing. A Pyrex chamber is included with plasma cleaner but a Quartz substitute is recommended for some applications.