By Integrated Dynamics Engineering GmbH
IDE pioneered the development of Feedforward control-where disturbing signals are recognized and intercepted prior to their influence on the system. IDE first implemented dynamic Feedforward concepts using floor motion sensors known as Floor Feedforward sensors. The use of this feature provides unique low frequency isolation in the range of 1–10 Hz. Applying Feedforward control to systems with XY- stages cancels the effects of the stage forces on the isolated payload. Combined with our Opticon family of high-speed digital controllers the interface between the host stage controller and the IDE system controller is seamless. Settling time after stage movement is virtually eliminated and the overall residual payload motion is greatly reduced.
Payload up to several tons Extremely accurate horizontal & vertical motion range Cleanroom class ISO 1 Vacuum tool compatible Tool integrated w/o footprint increase
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Active Vibration Platform - Sandwich style isolation platform - Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances - Compact design with integrated controller enables easy installation and tuning - Ultra-fast settling time - Stage and floor feed-forward options
CATEGORY
Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options
CATEGORY
