By Integrated Dynamics Engineering GmbH
Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options
Payload up to several tons Extremely accurate horizontal & vertical motion range Cleanroom class ISO 1 Vacuum tool compatible Tool integrated w/o footprint increase
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Active Vibration Platform - Sandwich style isolation platform - Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances - Compact design with integrated controller enables easy installation and tuning - Ultra-fast settling time - Stage and floor feed-forward options
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Active Vibration Isolation Modules - The most advanced isolation system on the market - Patented high vacuum compatible technology - 0.5 Hz natural frequency - 40dB isolation at 5 Hz; 60dB isolation at 20 Hz - Stage and floor feed-forward options
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