By Integrated Dynamics Engineering GmbH
IDE’s family of active vibration isolators have been proven to provide superior performance at low frequency (a common effect of walking traffic nearby). Unlike stiffer isolators (ceramic based), IDE isolator technology protects critical images so they are stable, clear and unaffected even in the most heavily trafficked, severely disturbed environments. Extensive IDE research has shown that with the limited range of "extended stroke" units, piezo isolators are typically ineffective at isolating high magnitude disturbances. In limited applications where hard mount systems are appropriate, IDE offers the solution of highly dependable and effective stiff coil spring isolation systems, without the reliability risk associated with piezo.
Payload up to several tons Extremely accurate horizontal & vertical motion range Cleanroom class ISO 1 Vacuum tool compatible Tool integrated w/o footprint increase
CATEGORY
Active Vibration Platform - Sandwich style isolation platform - Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances - Compact design with integrated controller enables easy installation and tuning - Ultra-fast settling time - Stage and floor feed-forward options
CATEGORY
Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options
CATEGORY
