By Integrated Dynamics Engineering GmbH
The SMS overall performance comes mainly from the passive spring element. The active feedback system uses efficient contactless high force linear actuators, combined with seismic inertial vibration sensors, and Mechopneumatic or high speed Electro pneumatic leveling valves. As a result, the system remains inherently soft, which provides excellent broadband low frequency isolation and active payload "sky hook" damping.
Payload up to several tons Extremely accurate horizontal & vertical motion range Cleanroom class ISO 1 Vacuum tool compatible Tool integrated w/o footprint increase
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Active Vibration Platform - Sandwich style isolation platform - Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances - Compact design with integrated controller enables easy installation and tuning - Ultra-fast settling time - Stage and floor feed-forward options
CATEGORY
Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options
CATEGORY
