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Semiconductor Metrology Tools
MetrologyInstrumentation

Semiconductor Metrology Tools

By Rigaku

Semiconductor Metrology Tools X-ray metrology solutions from lab to fab WDXRF Flexible elemental analysis for thin films XRR, EDXRF & Optical X-ray and hybrid metrology solutions for blanket and patterned wafers TXRF Wafer surface contamination metrology HRXRD X-ray metrology for epitaxial films XRT Non-destructive dislocation imaging XRD X-ray diffraction for crystallographic orientation of wafers and ingots CDSAXS X-ray critical dimension metrology

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