Extreme Ultraviolet Light Sources Compact, Reliable EUV Using Electrodeless Z-Pinch™ Technology EQS-10 The Next-Generation EUV Source from Energetiq EQ-10R High-Reliability, High-Stability 10 Watt EUV Source for EUV R&D EQ-10R-HP High-Brightness 20 Watt, EUV Source for Metrology and Testing EQ-10R-SXR Semiconductor Metrology & Water-Window Microscopy Modular Design for Easy Integration Energetiq’s uniquely designed EUV light sources minimize heat load and reduce debris, giving you control over peak brightness and peak power in a compact, modular unit. Advancements in fields such as semiconductor lithography, mask blank inspection, materials research and life sciences research rely on plasma-based light sources that generate radiation between the deep ultraviolet and x-ray regions (10 to 50 nm). Traditional method of producing extreme UV light uses electrodes, which generate heat and produce unwanted debris – not suitable for production environments. Energetiq’s Electrodeless Z-Pinch™ EUV sources use a patented design that inductively couples the current into the plasma to generate ultrashort-wavelength UV radiation in a clean, cool way. The modular design delivers high up-time and field-proven reliability with the flexibility of user-controlled outputs for optimized power and brightness. - Ease of use and reliability suitable for photoresist R&D - Minimal heat load - Excellent spatial stability - High repetition rate - Stable, repeatable power output - Simple, flexible optical interface - CE Mark and SEMI S2-0715 compliant Electrodeless Z-Pinch™ Technology Clean Operation, Small Plasma Size, and Maximum Flexibility Energetiq’s unique technology is also based on a Z-pinch plasma, but it avoids electrodes entirely by inductively coupling the current into the plasma. The plasma in the Energetiq source is magnetically confined away from the source walls, minimizing the heat load and reducing debris. EQS-10 EQ-10R-HP EQ-10R-SXR Typical Output Power 40 W* 20 W* 400 mW✝ Typical Brightness 12 W/mm².sr 8 W/mm².sr N/A Pulse Rate Up to 5 kHz Up to 2.5 kHz Up to 2 kHz Target Gas Xenon Xenon Nitrogen Applications EUV Metrology EUV Microscopy Materials Research Metrology Microscopy Inspection Water-Window Microscopy Optics Testing *Power into 2π steradians (13.5nm ±1% bandwidth).✝Power into 2π steradians (2.8nm line emission). Note: Performance measures in this Selection Guide are typical values for guidance in the selection and use of the EQ-10 Series products. They are not to be taken as specifications. Please Contact Energetiq for further details: info@energetiq.com. What applications is the EQ-10 Series best suited for? The EQ‑10 Series is widely used in semiconductor inspection, optical metrology, scientific research, and advanced materials development. Can the EUV output be shaped or directed for specific use cases? Yes. The EUV beam can be collimated or directed using appropriate optics and alignment tools. What is the difference between the models in the EQ-10 Series? The EQ‑10 Series includes several EUV and soft X‑ray light sources built on Energetiq’s Electrodeless Z‑Pinch plasma technology. Each model is optimized for different performance levels and application needs. EQS‑10 – A next‑generation EUV source delivering up to 40 W at 13.5 nm (±1%) and repetition rates up to 5 kHz. Ideal for EUV metrology, photoresist development, and applications requiring high brightness and throughput. EQ‑10R – A stable, reliable EUV source providing 10 W‑class performance for general EUV R&D, inspection, and materials research. Designed for long‑term stability and repeatability. EQ‑10R‑HP – A high‑brightness model offering 20 W EUV output and 8 W/mm²·sr brightness, suitable for metrology, testing, and applications requiring higher photon flux. Operates up to 2.5 kHz. EQ‑10R‑SXR – A soft X‑ray variant optimized for water‑window microscopy and materials imaging, producing ~400 mW at 2.8 nm. In short: Choose EQS‑10 for maximum power and speed. Choose EQ‑10R‑HP for high brightness and metrology. Choose EQ‑10R for stable, general‑purpose EUV research. Choose EQ‑10R‑SXR for soft X‑ray imaging applications.
Now featuring extended near-infrared (NIR) wavelengths | 380 nm to 1,100 nm Extended wavelength range now available. The Chromatiq Spectral Engine™ (CSE) is a sophisticated light source capable of matching real-world lighting conditions, emulating illuminant standards, and creating custom spectra. Our award-winning Chromatiq Spectral Engine now features extended near-infrared (NIR) wavelengths that cover the full active range of silicon-based detectors, from 380 nm to 1,100 nm, offering precise alignment between light source and detector. Features - High-fidelity spectral matching - Create and combine custom spectra to meet specific requirements - Integrate into automated ambient light sensor calibration and testing systems The CSE offers unparalleled spectrum match accuracy as well as repeatability and speed when switching between spectra to optimize optical testing and calibration procedures in the production environment. The CSE is built around the high radiance and stability of the Laser-Driven Light Source (LDLS®). The performance of the LDLS, combined with the innovative optical design of the CSE system, enables consistent high-fidelity spectrum matching, rapid switching between selected spectra, and stable color content at various intensities. These attributes support the accurate, repeatable, and efficient production of high-end color, image sensors and ambient light sensors. Match Any Spectrum Extremely fast switching – no settling time between matches. Principle of Operation Optical design optimized for high-fidelity matching Fast switching with no setting time. <10 ms settling time between targeted spectra The CSE applies the unique characteristics of the Laser-Driven Light Source (LDLS®), paired with a digital micromirror device (DMD), to enable users to match any kind of light spectrum, including realistic lighting conditions, standard illuminants, combinations of specific lighting sources, and custom spectra. In contrast to conventional arc lamps, which are operated by running a current through electrodes, an LDLS sustains the emitting plasma by focusing a laser into the light bulb. The result is extremely bright, broadband light from a very small and stable spot. This proprietary technology is at the heart of the CSE, enabling the unmatched spectral resolution, stability, and repeatability of the DMD light source system. The CSE is spectrum tunable source capable of spectral reproduction, spectral color matching, and has the ability to emulate near-infinite combinations of light sources ranging from incandescent to highly structured light sources, such as CFLs, with extremely fast switching necessary to support high-throughput optical component calibration and ambient light sensor characterization. Applications Color and image sensor calibration and testing Image sensor development for vehicle perception systems Color measurement system development and testing Systems are now available for on-site demonstration. Schedule a demo to see how CSE or CSE-NIR work in your space. What is the lifetime / output degradation of the CSE? We recommend changing the bulb inside the laser-driven light source that powers the CSE after 10,000 hours of operation. We define the lifetime of the lamp / bulb as when the intensity has dropped more than 50% at 500 nm. The spectral output at 500 nm decreases about 1% - 2% every 1,000 hours under standard operating conditions with nitrogen purging. How is the CSE different from the Laser-Driven Tunable Light Source (LDTLS®)? The LDTLS generates light within a narrow wavelength band. The narrow band can be centered on a single center wavelength, or progressively scanned across a specific wavelength range. The CSE can match any broadband spectrum and can also generate narrow peaks, either single, or multiple. The CSE can provide a narrow-band wavelength sweep. However, if the narrow-band wavelength sweep is all that is needed, the LDTLS will offer better performance in terms of in-band flux. Does the CSE require nitrogen purge? Yes. Energetiq recommends purging with grade of 4.8 nitrogen or higher filtered to 5 μm, to maintain the optics’ cleanliness. Any less nitrogen grade may cause implications for the lamp head optics and could cause a photo-contamination. Does the CSE require an external spectrometer? The CSE Host Application includes an automated system characterization process that adjusts the output of the CSE based on feedback from a calibrated spectrometer. Characterization is typically performed during system installation and periodically thereafter (typically every month or every several months). An individual spectrometer can support a fleet of any number of CSE systems. One of the following spectrometer models is required for characterization. Is the CSE a laser product? No. During all normal operation of the CSE, there is no laser output. Our products create incoherent broadband radiation. In a contained system, a laser is used to sustain a xenon plasma and the radiation exiting the CSE is from the plasma. Performance Specification Wavelength Range: 380 – 780 nm / 380 – 1100 nm Spectral Resolution: < 5 nm / <15 nm Switching Speed: < 10 ms / < 10 ms Output Type: 6.5 mm liquid light guide / 6.5 mm liquid light guide
CATEGORY
Meet the new Chromatiq Spectral Engine™ Now featuring extended near-infrared (NIR) wavelengths | 380 nm to 1,100 nm Extended wavelength range now available. The Chromatiq Spectral Engine™ (CSE) is a sophisticated light source capable of matching real-world lighting conditions, emulating illuminant standards, and creating custom spectra. Our award-winning Chromatiq Spectral Engine now features extended near-infrared (NIR) wavelengths that cover the full active range of silicon-based detectors, from 380 nm to 1,100 nm, offering precise alignment between light source and detector. Features - High-fidelity spectral matching - Create and combine custom spectra to meet specific requirements - Integrate into automated ambient light sensor calibration and testing systems There are two CSE models available: CSE-EQ-99-VIS, [Extended-range] CSE-EQ-99-VIS-NIR The CSE offers unparalleled spectrum match accuracy as well as repeatability and speed when switching between spectra to optimize optical testing and calibration procedures in the production environment. The CSE is built around the high radiance and stability of the Laser-Driven Light Source (LDLS ®). The performance of the LDLS, combined with the innovative optical design of the CSE system, enables consistent high-fidelity spectrum matching, rapid switching between selected spectra, and stable color content at various intensities. These attributes support the accurate, repeatable, and efficient production of high-end color, image sensors and ambient light sensors. Performance Specification CSE-EQ-99-VIS-NIR: Wavelength Range 380 – 1100 nm; Spectral Resolution <15 nm; Switching Speed < 10 ms; Output Type 6.5 mm liquid light guide Match Any Spectrum Extremely fast switching – no settling time between matches. Principle of Operation Optical design optimized for high-fidelity matching Fast switching with no setting time. <10 ms settling time between targeted spectra The CSE applies the unique characteristics of the Laser-Driven Light Source (LDLS ®), paired with a digital micromirror device (DMD), to enable users to match any kind of light spectrum, including realistic lighting conditions, standard illuminants, combinations of specific lighting sources, and custom spectra. In contrast to conventional arc lamps, which are operated by running a current through electrodes, an LDLS sustains the emitting plasma by focusing a laser into the light bulb. The result is extremely bright, broadband light from a very small and stable spot. This proprietary technology is at the heart of the CSE, enabling the unmatched spectral resolution, stability, and repeatability of the DMD light source system. The CSE is spectrum tunable source capable of spectral reproduction, spectral color matching, and has the ability to emulate near-infinite combinations of light sources ranging from incandescent to highly structured light sources, such as CFLs, with extremely fast switching necessary to support high-throughput optical component calibration and ambient light sensor characterization. Example Match: CIE F12 Applications Color and image sensor calibration and testing Image sensor development for vehicle perception systems Color measurement system development and testing
CATEGORY
Harness Soft X-Ray Technology Other than in synchrotron facilities, soft x-rays (SXR) are difficult to produce. Now, soft x-rays are readily available for any research laboratory at flux levels suitable for imaging and microprobing. The Energetiq EQ-10R- SXR is a compact, easy-to-use, reliable and cost-effective SXR light source system, based on Energetiq’s unique Electrodeless Z-Pinch™ technology using Nitrogen gas. The EQ-10R-SXR source comprises a 19" rack containing the gas subsystems, power delivery subsystem, and control electronics; the Electrodeless Z-Pinch™ source assembly with its integrated vacuum pumping; and a high efficiency pulse modulator. This modular design allows easy integration to the microscope or other applications equipment. The EQ-10R-SXR is capable of delivering up to 400 milliwatts of 2.8 nm power into 2pi steradians and will run continuously at pulse repetition rates of up to 2 kHz. It's easy to install, requiring only electrical power, a chilled water supply, clean dry compressed air, and a supply of high purity Nitrogen. Features Patented electrodeless design Low debris / low consumable cost 2-20 nm Soft X-Rays, gas dependent Enables tabletop SXR microscope applications Small plasma size <1mm diameter for high brightness Cost-effective and compact Low cost per SXR Watt Small footprint Applications Semiconductor Metrology Water-Window Microscopy Electrodeless Z-Pinch™ Technology Clean Operation, Small Plasma Size, and Maximum Flexibility - Clean operation with no electrode debris and magnetically confined plasma - Unmatched spatial stability - Lower cost and complexity - Flexible, adjustable operating conditions - Optimized for peak power or peak brightness - Small plasma size (typically below 1mm in diameter) - Simple, flexible, customizable optical interface with color touch screen display - Manual and automatic operation Patent Numbers: US 7,307,375 -- US 7,948,185 -- DE 1774838 -- DE 2187711 -- GB 1774838 -- GB 2187711 -- JP 5179175 -- KR 10-1173324 NL 1774838 -- NL 2187711 -- US 8,143,790 -- US 7,199,384 -- US 7,183,717 -- US 7,569,791 -- US 8,019,043
CATEGORY
Electrodeless Z-Pinch™ 20 Watt EUV Source High Brightness for EUV Metrology and Inspection With 20 watts, the EQ-10R-HP is ideal for EUV mask inspection, resist development, and more. High pulse repetition rates and low cost per EUV watt make the EQ-10R-HP a highly effective light source powered by our Xenon-based Electrodeless Z-Pinch™ technology. With over 30 EQ-10 units installed around the world, it has become the workhorse for the EUV community through its proven reliability, ease of use, and low operating cost. Its modular design makes it easy to integrate into your process. The system includes the Electrodeless Z-Pinch™ source assembly, vacuum and gas subsystems, power delivery subsystem, and control electronics. The EQ-10R-HP is capable of delivering up to 20 Watts of in-band EUV into 2pi steradians, and will run continuously at pulse repetition rates of up to 2.5 kHz. Features Unique patent-pending Electrodeless Z-Pinch™ technology Low debris / low consumable cost 20 W into 2 pi using Xenon Higher brightness and power for a wide variety of applications Small plasma size Below 1 mm diameter Cost-effective and compact Low cost per EUV Watt Small footprint CE-Mark and SEMI S2-0715 compliant Applications EUV Mask Inspection EUV Metrology EUV Resist Development EUV Microscopy Electrodeless Z-Pinch Technology Clean Operation, Small Plasma Size, and Maximum Flexibility - Clean operation with no electrode debris and magnetically confined plasma - Unmatched spatial stability - Lower cost and complexity - Flexible, adjustable operating conditions - Optimized for peak power or peak brightness - Small plasma size (typically below 1mm in diameter) - Simple, flexible, customizable optical interface with color touch screen display - Manual and automatic operation Patent Numbers: US 7,307,375 -- US 7,948,185 -- DE 1774838 -- DE 2187711 -- GB 1774838 -- GB 2187711 -- JP 5179175 -- KR 10-1173324 NL 1774838 -- NL 2187711 -- US 8,143,790 -- US 7,199,384 -- US 7,183,717 -- US 7,569,791 -- US 8,019,043
CATEGORY
