By Nanovac AB
Nanovac ABs Thermal Vacuum Chambers (TVCs) are state of the art advanced thermal vacuum chambers. Nanovac AB have worked in the high vacuum industry since 1993 and has become a leading manufacturer of advanced vacuum systems, ranging from central vacuum plants to plasma processing systems. We have also manufactured and delivered some of the worlds most advanced thermal vacuum solutions. Our philosophy when building and designing systems is to make no compromise on quality or components used. We only use the best solutions with parts from the best OEM manufacturers. In our systems we employ the latest technology when it comes to control and data logging ensuring that our customers have full traceability when operating our systems. Our thermal vacuum chambers use patent pending technology to ensure maximum performance with maximum repeatability and reliability. Our solutions are cost effective, and we do not only supply custom solutions but we also have a comprehensive suite of standard thermal vacuum systems available with short delivery times.
The R&D system, PVD-2-RS is our low cost PVD system, utilizing two resistive sources for deposition.
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We also manufacture and design custom PVD (physical vapor deposition) systems for demanding thinfilm R&D applications.
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We are also manufacturing reverse engineered consumable parts for plasma etch and deposition systems.
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Horizontally loaded thermal vacuum test chambers allows for horizontal loading of the DUT (device under test). Our solutions are to a large extent custom designed, as dimensions of the DUT many times drive the size of the chambers. Inner diameters typically range from 500mm in diameter up to several meters depending on the enduser test requirements. We can deliver with hinged doors in both the front and rear of the chamber, alternatively having only one end with a door. The door can be left or right hinged, or mounted on a sliding mechanism. By default the thermal test plate is installed on a sliding rail mechanism to simplify loading/unloading and setup of the test campaign.
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