By Integrated Dynamics Engineering GmbH
IDE’s advanced high-speed controller technology provides the broadest bandwidth of truly active control in the most challenging environments. Furthermore, IDE’s advanced control algorithms and high dynamic actuators deliver an immediate response and ultra-fast settling time in 6 degrees of freedom. With high motor force output and long stroke capability, IDE’s systems are highly effective in the toughest, most demanding customer locations.
Payload up to several tons Extremely accurate horizontal & vertical motion range Cleanroom class ISO 1 Vacuum tool compatible Tool integrated w/o footprint increase
CATEGORY
Active Vibration Platform - Sandwich style isolation platform - Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances - Compact design with integrated controller enables easy installation and tuning - Ultra-fast settling time - Stage and floor feed-forward options
CATEGORY
Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options
CATEGORY
