WS-1000 Wet Station for Spin Coaters

By Laurell Technologies Corporation

About the WS-1000 The Laurell WS-1000 Series Spin-Process Stations allow a fully configured and tested module to be constructed and shipped complete — requiring only the minimum of installation time. Easy to load and operate — everything is in convenient reach to the operator. Dimensions 48" W x 43 3/8" D x 74 1/4" H (121.9cm W x 110.04cm D x 188.60cm H) Typical Processes including, but not limited to: - Coating - Etching - Developing — Aqueous / Solvent - Cleaning — Aqueous / Solvent - Yes, Sulfuric / Peroxide (in situ mixing) - Yes, HBr - Temperature-controlled Developing - Rinsing / Drying Features - All-polypropylene construction (self-extinguishing available, see below*) - Accommodates the installation of any Laurell spin processor - Perforated wet-deck (easily removable) - Wet plenum - Exhaust Plenum with gauge - Isolated component / drawer below for heaters, pumps, vessels... Options - Touch Screen Control Interface - Processor exhaust interlock (standard on EDC ™ models) - Chemical Heating - Through pressure vessel material stirring (magnetic) - Rinse to resistivity - Drain diverter(s) - Vacuum loading wand - Wafer cassette stand - Leak detection - Light towers *Advanced materials available if required Flame-Retardant Option Best WS-1000-CP7-D — a polypropylene formulation whose flame retardant characteristics meet the most rigorous FMRC 4910 testing standards for most aspects of flame retardation, self-extinguishing characteristics and burn-through. This advanced material also meets or exceeds test standards for low smoke generation and minimal toxic by-products. Need a smaller (2'), less elaborate station? See WS-1000MH