Metal case enclosed piezo-electric element used (custom-made) Model Number: custom design examples Nominal diameter: Large dia. Travel range ( Closed loop ): 100μm Resolution: 2nm Repeatability: ±2nm Resonant frequency ( 0g Load ): - Built-in displacement sensor: Capacitive displacement sensor Body Material: Aluminum
Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement. Available from a compact to large openings: The stages are available in various openings, from a compact-opening type, which is suitable for small devices, to a large-opening type, in which a large panel substrate can be aligned. Smooth and accurate scanning: Each stage is capable of performing a highly-reliable operation according to a command signal thanks to high-accuracy feedback control. Applications: - SPM,AFM - Microscope tables - Spectroscopic instruments - Semiconductor & FPD-related inspections - Photolithography systems, Exposure devices - Mapping measurements PKVH60-012UL: Travel range ( Closed loop ) 12μm; Resolution 1nm; Repeatability ±1nm; Load capacity 10N; Resonant frequency ( 0g Load ) 2500Hz; Built-in displacement sensor Capacitive displacement sensor; Body Material Aluminum. PKVL64F-100UL: Travel range ( Closed loop ) 100μm; Resolution 2nm; Repeatability ±2nm; Load capacity 10N; Resonant frequency ( 0g Load ) 480Hz; Built-in displacement sensor Capacitive displacement sensor; Body Material Aluminum＋Steel. PKVL100-100UL: Travel range ( Closed loop ) 100μm; Resolution 2nm; Repeatability ±2nm; Load capacity 10N; Resonant frequency ( 0g Load ) 480Hz; Built-in displacement sensor Capacitive displacement sensor; Body Material Aluminum＋Steel. PKVL84F-300UL: Travel range ( Closed loop ) 300μm; Resolution 10nm; Repeatability ±10nm; Load capacity 10N; Resonant frequency ( 0g Load ) 210Hz; Built-in displacement sensor Capacitive displacement sensor; Body Material Aluminum＋Steel. PKVL60-100UL: Travel range ( Closed loop ) 100μm; Resolution 2nm; Repeatability ±2nm; Load capacity 10N; Resonant frequency ( 0g Load ) 380Hz; Built-in displacement sensor Capacitive displacement sensor; Body Material Aluminum＋Steel. PKVL60-200UL: Travel range ( Closed loop ) 200μm; Resolution 5nm; Repeatability ±5nm; Load capacity 10N; Resonant frequency ( 0g Load ) 350Hz; Built-in displacement sensor Capacitive displacement sensor; Body Material Aluminum＋Steel. PKMVL160-200UL: Travel range ( Closed loop ) 200μm; Resolution 5nm; Repeatability ±5nm; Load capacity 10N; Resonant frequency ( 0g Load ) 150Hz; Built-in displacement sensor Capacitive displacement sensor; Body Material Aluminum.
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This stage is designed for fine adjustment of the angle of optical mirrors. It excels in high-speed oscillation and high positioning reproducibility, and is optimal for applications such as laser beam scanning and precision mirror alignment. A stage for a large-diameter mirror is also available on a custom order basis Since the piezo element as the drive source has a large generative force (at hundreds of N), the stage is capable of stably performing positioning with high accuracy even for a heavy, large-diameter mirror. Angle control is also easy Even a static motion for moving the mirror by specifying the angle in a value, and an oscillating motion for reciprocally oscillating the mirror on a continuous basis, can be easily performed through a controller/driver. Applications - Optical axis adjustment - Cavity adjustment - Scanning laser beam - Laser processing - Tilt adjustment - Biophotonic Single-axis tilting (θx) Models: PT1M36-500SL, PT1T60-500SL Deflection angle Closed loop: 500"[second]≒0.14°≒2.4mrad (PT1M36-500SL), 500"[second]≒0.14°≒2.4mrad (PT1T60-500SL); Open loop: 630"[second]≒0.175°≒3.1mrad (PT1M36-500SL), 550"[second]≒0.15°≒2.6mrad (PT1T60-500SL) Resolution: 0.05"[second]≒0.24μrad (PT1M36-500SL), 0.02"[second]≒0.10μrad (PT1T60-500SL) Repeatability: ±0.05"[second]≒±0.24μrad (PT1M36-500SL), ±0.02"[second]≒±0.10μrad (PT1T60-500SL) Load capacity: 0.3N (PT1M36-500SL), 10N (PT1T60-500SL) Resonant frequency (0g Load): 8000Hz (PT1M36-500SL), 1800Hz (PT1T60-500SL) Built-in displacement sensor: Capacitive displacement sensor Body Material: Aluminum Double-axes tilting (θxθy) Models: PT2M60-240SL, PT2M120-500SL, PT2M40-800SL Deflection angle Closed loop: (θx,θy) 240"[second]≒0.07°≒1.2mrad (PT2M60-240SL), (θx,θy) 500"[second]≒0.14°≒2.4mrad (PT2M120-500SL), (θx,θy) 800"[second]≒0.22°≒3.9mrad (PT2M40-800SL); Open loop: (θx,θy) 290"[second]≒0.08°≒1.4mrad (PT2M60-240SL), (θx,θy) 580"[second]≒0.16°≒2.8mrad (PT2M120-500SL), (θx,θy) 900"[second]≒0.25°≒4.4mrad (PT2M40-800SL) Resolution: (θx,θy) 0.05"[second]≒0.24μrad Repeatability: (θx,θy) ±0.05"[second]≒±0.24μrad Load capacity: 0.5N (PT2M60-240SL), 5N (PT2M120-500SL), 1N (PT2M40-800SL) Resonant frequency (0g Load): 760Hz (PT2M60-240SL), 180Hz (PT2M120-500SL), 330Hz (PT2M40-800SL) Built-in displacement sensor: Capacitive displacement sensor Body Material: Aluminum (PT2M60-240SL), Aluminum (PT2M120-500SL), Aluminum + Steel (PT2M40-800SL)
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This product is a controller intended to drive and control an Piezo motor stage. In the controller, a control circuit and a driver are structurally integrated. If a piezo motor stage is connected to the controller, it can perform closed control using an optical linear encoder with an ABZ-phase output. The user can easily operate the controller by transmitting a control command from the computer via LAN, RS485, USB or RS232C interface. Features - Space-saving with a slim body - Generates less heat itself - A type with a vacuum environment, a non magnetic type - High positional repeatability with a built-in liner encoder Application - High-accuracy positioning of an optical system - Laser alignment - Precision mapping measurement - X-ray/analysis and measuring equipment - Specimen stage for microscopes - Application in which the object is to be held static after position adjustment The product is very effective in applications where fixed-point positioning is mainly required or applications where the object is held static as the product is turned off after positioning. This product is a controller intended to drive and control an LS-type piezo motor stage. In the controller, a control circuit and a driver are structurally integrated. If a piezo motor stage is connected to the controller, it can perform closed control using an optical linear encoder with an ABZ-phase output. Based on a controller for two-axis stages and a controller for four-axis stages, controllers for controlling one to four axes are offered. The user can easily operate the controller by transmitting a control command from the computer via a LAN or an RS485 interface. The interface can be changed to an RS232C interface. Features - It contains a control board, a driver board and a linear sensor interpolator. Being chain-connected via RS485 inside, the controller also supports multi-axis application (depending on the linear sensor). - Once the controller for controlling one, two, three or four axes is connected to the corresponding stage, it can immediately perform high-resolution positioning control. - The drive control is achieved with a linear sensor having a resolution of 10 nm and a driver having a drive resolution of 1 nm or below. - Since the drive resolution is 1 nm or below, the controller can also adapt to more accurate linear sensor other than the standard sensor. - Since the internal control board is chain-connected via RS485, the controller also supports multi-axis application (127 axes at a maximum). Model Number: LC421A, LC421B, LC422A, LC422B, LC443A, LC443B, LC444A, LC444B Number of controlled axes: 1, 2, 3, 4 Built-in optical linear scale Type: Manufactured by RENISHAW, Manufactured by THK PRECISION Control interface: LAN, RS485 (standard equipment) USB, RS232C (Optional) External dimensions: W210×D228×H60 mm (Excludes the projection)
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Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes. Classification of performances with two mechanisms The mechanisms are classified into a "direct-drive mechanism," which has a high resonant frequency and is focused on high-speed response, and a "displacement magnification mechanism," which secures a stroke. Direct-drive mechanism - A mechanism in which a piezo-electric elements directly moves the table. - It excels in resolution and response thanks to a short stroke. - With high rigidity, it is capable of performing stable positioning even under a large load. Displacement magnification mechanism - The product has a mechanism for mechanically amplifying the elongation of the piezo-electric element. - A stroke several times to more than ten times longer than the direct-drive type can be obtained according to the magnification ratio. - Feedback control with the built-in displacement sensor also enables the positioning reproducibility to be maintained. Applications - Semiconductor and FPD inspection - HDD Tester - Laser optic alignment - Interferometer devices - Analytical Instruments - Nanometer positioning PKM2H Direct-drive mechanism Model Number: PKM2H130-040UL Travel range ( Closed loop ): 40μm Resolution: 1nm Repeatability: ±1nm Load capacity: 10N Resonant frequency ( 0g Load ): 1440Hz Built-in displacement sensor: Capacitive displacement sensor Body Material: Aluminum PKM2L Displacement magnification mechanism Model Number: PKM2L160-100UL, PKM2L160-200UL, PKM2L160-300UL Travel range ( Closed loop ): 100μm | 200μm | 300μm Resolution: 2nm | 5nm | 10nm Repeatability: ±2nm | ±5nm | ±10nm Load capacity: 10N | 10N | 10N Resonant frequency ( 0g Load ): 490Hz | 330Hz | 240Hz Built-in displacement sensor: Capacitive displacement sensor Body Material: Aluminum
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