GPD100C General Purpose, Dual-Output, High Voltage Power Supply Adjustable up to ±1000VDC, 150W per channel ■ SUMMARY The GPD100C is a general purpose, dual ‐output, reversible, high ‐voltage power supply designed for scientific, laboratory and industrial applications. ■ SPECIFICATIONS Input Power Range • 90 to 264 VAC at 50/60Hz Output On/Off Control • Front panel switches (two independent controls) • Remote digital control, USB, RS ‐232 Output Voltage Setpoint Control • Front panel controls (two independent controls) • Remote analog setpoint, USB, RS ‐232 Output Voltage Polarity Control • Front panel controls (two independent switches) • Remote digital control, USB, RS ‐232 Output Monitors • Voltage: 0 to ±10 VDC (0 to ±1000VDC full scale) • Current: 0 to ±10 VDC (0 to ±200mA full scale) • Analog monitors impedance: 600ohms Output Voltage Ripple • 0.1% RMS of rated full load Output Protection and Safety • Output short circuit protected • High temperature shutdown • Forced discharge circuit • Interlock circuit ■ FEATURES • General purpose high voltage power supply • Two independent, reversible outputs • High ‐power capability in a compact enclosure • Efficient switch ‐mode (SMPS) topology Output Voltage Range • From 0V to ±1000VDC, 0 to 150mA continuous Rear Panel Connections • GES MCS605 series six ‐pin high voltage connectors • IEC ‐60320 type AC input connector, locking • DB ‐25F subminiature remote control connector • DB ‐9F subminiature RS ‐232 connectors • USB Type A connector • Ground stud Environmental Conditions • 0ºC to 40 ºC operating temperature • To 85% relative humidity (non ‐condensing) Dimensions • 88.14mm (H) x 430.8mm (W) x 425.0mm (D) • Panel Width: 482.6mm (19”) Weight • 10.4kg (23lbs) Export Classifications • Meets EAR99 NLR export requirements • RoHS compliant Supplied Accessories • User’s manual and power cord NEW GPD100C Product Data Sheet, Rev F2 2 © 2019 Gripping Power, Inc. ■ INTERFACE SPECIFICATIONS Digital and Analog Remote Control The analog/digital interface remote interface connector is a DB ‐25 female type. The recommended interface pin connections are ‐ 1 Shield 2 HV1 Enable (Run HV1 Program ) 3 HV2 Enable (Run HV2 Program ) 4 Set HV1 polarity (open positive HV) 5 Set HV2 polarity (open positive HV) 6 Digital Input source/sink voltage (DISS) 7 Digital ground 8 Force HV off and discharge outputs (Abort ) 9 V1 output voltage setpoint magnitude (0 ‐10VDC) 10 V2 output voltage setpoint magnitude (0 ‐10VDC) 11 V1 current setpoint (reg/limit) (0 ‐10VDC) 12 V2 current setpoint (reg/limit) (0 ‐10VDC) 13 Analog ground 14 Fault (overload, output fault or over temp) 15 HV1 is on (HV1 program active ) 16 HV2 is on (HV2 program active ) 17 Remote mode (not in local mode ) 18 Digital Output source/sink voltage (DOSS) 19 +24 VDC (current limited) 20 Interlock input (relay input) 21 AC/DC power is on 22 V1 output voltage monitor (0 to ±10VDC) 23 V2 output voltage monitor (0 to ±10VDC) 24 V1 current monitor (0 to ±10VDC) 25 V2 current monitor (0 to ±10VDC) Pin 20 must be connected to a +24 VDC source (or pin 19) for the high voltage output to enable. Refer to the user’s manual for detailed information. All digital inputs and outputs can be sourcing (active high) or sinking (active low), depending on the connections to DISS and DOSS. Digital outputs are dry contact type. Digital inputs are bidirectional and optically isolated. RS ‐232 Interface The RS ‐232 interface connector is a DB ‐9 female type. The RS ‐232 serial interface pin connections are ‐ 2 Transmit Data Output 3 Receive Data Input 5 Common The GPD100C can be configured for 9600 or 19.2k baud. High Voltage Connector The high voltage output connectors are GES GB ‐MCS605 panel mount receptacles, with these connections ‐ 1 Chassis (Earth ground) 2 High Voltage Output (+) 3 Interlock 4 Interlock 5 High Voltage Output (‐) 6 No Connection The high voltage output of each channel is available across pin 2 to pin 5. The output is fully ‐floating and either output pin may be connected to ground. For the high voltage output to enable pin 3 must be connected to pin 4.
The GPX series are bipolar, floating, high-power, fully-programmable, electrostatic chuck power supplies for 200mm, 300mm and 450mm semiconductor wafer processing. They are compatible with Coulombic and Johnsen-Rahbek electrostatic chucks in applications such as RIE, ICP, PECVD and EUV lithography. Features - High-power capability for driving large-area Johnsen-Rahbek electrostatic chucks - Efficient switch-mode topology runs cool without forced air - Output center-point can be fully-floating, ground referenced or biased - Voltage output follows user defined chuck and dechuck algorithms - Up to eight different chuck and dechuck programs can be edited and stored for process flexibility - Declamp waveform frequencies of up to 10 cycles per second - Constant voltage and constant current regulation modes - Operation can be controlled by the front panel, analog and digital I/O, RS-232 serial or the USB interface - EtherCAT® and ModBus TCP/IP network interface options available - Wafer sensor adapts to various chuck sizes and RF delivery systems - Small size conserves instrument rack space Electrical GPX series power supplies can be factory configured to operate from 24VDC or 100-240 VAC 50/60Hz. Mechanical Dimensions: 82.5mm (H) x 210.3mm (W) x 300mm (D), 2U rack enclosure Panel Width: 241.3 mm (half-rack) The GPX series power supplies can replace the 645, 646, ECU, ESC10 and the EPS200 power supplies in all electrostatic chuck applications.
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The GPD Series are regulated, high-power, high-voltage power supplies with dual independent outputs which can be configured as electrostatic chuck drivers or bipolar and unipolar power supplies for general purpose laboratory applications which require dual, independent outputs. Features - High-power capability for driving 200mm or 300mm Coulombic or Johnsen-Rahbek electrostatic chucks - High-current, floating outputs for demanding laboratory requirements, such as capacitor charging applications - Operation can be controlled via analog and digital I/O or the high-speed USB interface - Models with reversible outputs features high current, solid state switches for long-life and fast response - Independent operation of each channel - Electrical interlock provided Electrical All GPD series power supplies are factory configured to operate from 100-240VAC, 50/60Hz. Mechanical Dimensions: 84.0mm (H) x 430mm (W) x 425mm (D), 2U rack enclosure Panel Width: 482.5 mm (full-rack)
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Improved thermal transfer performance; aluminum and ceramic hybrid design Precision manufactured – Flatness ≤3µm and surface roughness Ra ≤0.25µm Helium leak rate ≤0.15 sccm with a backside gas pressure of 10 Torr Nominal operation from 500 to 3000 VDC; current draw 10uA typical Wear resistant ceramic finish survives high-energy plasma etch and cleaning processes Custom, unique, low-volume ESC applications are our specialty Made in the USA; shorter lead times for standard products and new designs
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Gripping Power has produced electrostatic chuck power supplies which are programmable, bipolar, floating and tightly regulated. They are compatible with monopole and bipolar Coulombic and Johnsen-Rahbek electrostatic chucks and have proven reliability in applications such as RIE, ICP, PECVD and EUV lithography. They can support 150mm, 200mm and 300mm semiconductor wafer production down to the 10nm class and process development at the 5nm node.
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