Transition from maintenance to predictive, performance-driven services. Supporting tool matching, drift control, and productivity optimization. Increasingly enabled by AI/ML-driven insights and automation. Dry cleaning High selectivity, acid-free, low waste part cleaning Surface engineering ALD coatings, modification, high-precision refurbishing Automation tools PM-bot robotic system for precision maintenance For a guaranteed better uptime, lower defectivity, and higher performance consistency 10x selectivity improvement vs wet clean 5x longer usable part lifetime & better critical dimension (CD) control ~95% CO₂ reduction compared to "no refurb" 0 media cleaning leading to minimal byproduct
