NW
Contract Research (CRO)Research & Engineering

Advanced Imaging Mode for In-line 3D High Aspect Ratio Critical Dimension Metrology

By Nearfield Instruments B.V.

Nearfield Instruments continuously conducts R&D (in collaboration with its research partners) to develop advanced imaging and spectroscopy modes for challenging 3D devices in Memory and Logic. An example is the newly developed Feedforward Trajectory Planner (FFTP) imaging mode which has enabled on-device, non-destructive measurements for in-line process monitoring of GAA FETs at 3nm and beyond.