By MEMS and Nanotechnology Exchange (MNX)
The MNX offers advanced e-beam lithographic services to its customers. This service is offered at affordable hourly rates, and provides quicker turn-around via a recently installed state-of-the-art e-beam tool. Key benefits of this service include: - performed on a brand new state-of-the-art e-beam system (Vistec EBPG 5000+ upgraded to accelerate throughput in tool); - fast scan rate - 50MHz scan speed = high throughput and lower cost; - spot size below 2.5 nm; large scan field size; - field stitching and alignment accuracy below 30 nm; 10-wafer holder load lock (reduces pump down times); - fast cycle times; - service performed by e-beam experts; - variety of resist types are available; - inexpensive hourly rates for MNX customers. For more information and to discuss your e-beam service needs, contact MNX at engineering@mems-exchange.org or call us at 703-262-5368 as ask to speak with an engineer.
