By Lam Research
Productivity Upgrades enhance system output of good product by increasing uptime, throughput, and yield at lower operational costs: - Uptime – increase overall system availability by improving reliability and serviceability, extending preventive maintenance cycles, and reducing maintenance time - Throughput – increase tool output by reducing non-productive time, reducing recipe time, and optimizing wafer flow efficiency - Yield – increase output of good product by reducing defects, excursions, and scrapped wafers - Green – support customer green initiatives and regulatory compliance by conserving energy and reducing gas usage as well as reducing perfluorocarbon (PFC) output
