By NANOVEA
Flatness <1um over 500mm with no correction FLATNESS | WARPAGE ANALYSIS - 3D & 2D surface waviness & flatness - Best polynomial match - Material & bearing ratios - Distance measurement - FLTt peak to valley flatness deviation of the surface - FLTp peak to reference flatness deviation - FLTv reference to valley flatness deviation - FLTq rms flatness deviation TESTING STANDARDS - ISO 25178, ISO 4287, ISO 13565-2, ISO 12085, ISO 12780, ISO 12181 * Instrument parameter limits may differ from those specified within the standard.
