By Gencoa Ltd
A common request is to replace corroded magnetic packs or to improve the target utilization or uniformity performance of cathodes. Gencoa can magnetically model and simulate either a direct replacement magnetic array, or fit a new high performance magnetic array which can deliver significant improvements to target usage and uniformity. Gencoa use both 2D and 3D magnetic modelling, target erosion simulation, magnetic field uniformity scanning and pre-delivery plasma testing. For large area glass sources we have developed a highly accurate method of measuring field uniformity. Every linear magnetron we produce undergoes a field mapping as the last stage in the production process.
