By Oxford Materials Characterisation Service
CONTACT AND NON-CONTACT PROFILOMETRY Veeco DekTak 6M Stylus Profiler - Measures step heights on any surface, - Programmable stylus force down to 1 mg - Z-height capability from 0.1 nm to 1 mm - Scan lengths to 25 mm - Measure surface roughness, waviness, texture μSurf Nanofocus - Confocal Optical Profiler - 3D optical measurement system based on whitelight confocal microscopy - Measure optically complex surface structures while maintaining high vertical and lateral resolution Omniscan MicroXAM 5000B 3D ADE Phase Shift Interference Contrast Optical Profiler - Non-contact profiler - Measures step heights from less than 1 nm (10 Angstrom or 0.001 μm) up to 100 μm - 3D surface mapping - Quantitative, visual and confocal modes using optical interferometry - NIST traceable correlation - Calculation of peak, plateau, summit and valley surface statistics including analysis of of peak, plateau, summit and valley surface characteristics - Fourier and autocovariance analysis and surface filtering - Interactive zoom - X-Y and line segment profiles - 3D wire, hybrid and solid plots - Area difference plot for step height measurement - Fourier analysis for visualizing and characterizing periodic structures in surface maps - Stitching of measurements to form a large scale, high-density map
