At the center of the Bertucci Nanotechnology Laboratory is the brand-new 8,500-square-foot Class 10/100 Eden Hall Foundation Cleanroom. Characterized as one of the most energy-efficient cleanrooms in the United States—more than three times as efficient as many cleanrooms of similar size and class—this facility has helped Scott Hall earn the distinction of being certified LEED Gold by the U.S. Green Building Council. In addition to the cleanroom, the facility includes a post-processing lab, tool development space, and offices for our highly-qualified technical staff. Furthermore, the lab features stateof-the-art controls, 19 brand-new wet chemistry decks, three EMI-shielded rooms, and many other advanced features designed to support a continuously growing and diversified set of users. Some of the key highlights of the new facility include: - 19 new wet decks (5 for general or standard solvent processes, 2 for specialty solvent processes, 3 for spin-coating of resists, 4 for development of resist, 5 for acid/base processes) - 3 EMI shielded e-beam rooms - Advanced gas distribution and monitoring - L ab management software for auto logging and tool access Facilities Details Compressed air Nitrogen gas Deionized water
