By Melbourne Centre for Nanofabrication
Ashing is a surface cleaning process used to descum and remove materials, mainly photoresist, from a substrate. The cleaning process involves exposing photoresist to plasma, in a vacuum environment, creating ash which is easily removed from the substrate surface. MCN has two ashers, the Plasma Asher: Harrick Plasma and the Large Barrel Asher: Alpha Plasma Q235. - Plasma Ashing Large Plasma Asher Alpha Plasma Q235 Plasma Asher commonly used to clean materials of organics materials, and can also be used for surface treatment of materials. - Plasma Ashing Benchtop Plasma Asher Harrick Plasma treatment of material surface.
