By Montana State University - Montana Microfabrication Facility (MMF)
ATV PEO 603 Oxidation Furnace — Internal $84/hr, External Academic $126/hr, External Industrial $168/hr, ~Training time 4 hrs Modulab Oxidation Furnace — Internal $84/hr, External Academic $126/hr, External Industrial $168/hr, ~Training time 4 hrs Modulab Phosphorus Diffusion Furnace — Internal $84/hr, External Academic $126/hr, External Industrial $168/hr, ~Training time 4 hrs Lindberg/Blue Boron Diffusion Furnace — Internal $84/hr, External Academic $126/hr, External Industrial $168/hr, ~Training time 4 hrs Allwin21 AccuTermo AW 610M — Internal $84/hr, External Academic $126/hr, External Industrial $168/hr, ~Training time 4 hrs
