By Montana State University - Montana Microfabrication Facility (MMF)
Please follow this link to PDF manual download. Lithography ABM contact aligner YES III vapor prime oven Solvent/Headway spinner bench EMS Hotplate TrioTech Hotplate Laurell Spin Coater CEE Spin Coater and hotplate Polos Hotplate Deposition Amod Evaporator Angstrom Sputter System Denton BTT - Thermal Evaporator EvoVac Evaporator Anric AT-410 ALD ECSI Fibrotools IKO JR Electroplater Etching Oxford ICP PVA Tepla Ion 10 Harrick HP-001 High Power Plasma Cleaner Thermal Processing ATV PEO 603 Oxidation Furnace Modulab Oxidation Furnace Modulab Phosphorus Diffusion Furnace Lindberg/Blue Boron Diffusion Furnace Allwin21 AccuTermo AW 610M Packaging K&S 4523AD Wedge Bonder AML Wafer Bonder Disco DAD 3221 Dicing Saw Photonics Packaging and Test Keyence VKX-3000 Laser Scanning Confocal Microscope and White Light Interferometer Tresky T-5300 Component Placer and Flip Chip (coming July 2026) KrellTech NOVA Polishing System (coming late April 2026) Thorlabs Alignment and Assembly Station (coming early April 2026) Semi-automatic Photonics Test Station (coming summer 2026) Metrology Filmetrics Profilm 3D optical profilometer Filmetrics F3 Dektak XTa Stylus Profilmeter Ellipsometer Wet Benches Acid process wetbench Cobleigh 523 General Use Wetbench Cobleigh 525A General Use Wetbench Barnard 107 Base Bench Barnard 107 Solvent Bench Miscellaneous COMSOL FEA Flacktek DAC 330-100 SE Model Mixer Semiconductor Analyzer and Probe Station
