By Melbourne Centre for Nanofabrication
Nano imprint lithography involves a pattern-transfer technique similar to hot embossing, though it is achieved by using a UV curable resist and subjecting the mold to UV light, rather than heat and pressure. This is useful in the creation of patterned media, optics, and lab on a chip systems. Nanoimprint Lithography at MCN is performed on either the EVG 520IS or the EVG6200.
