By ASRC Nanofabrication Facility
For training requests, please email the tool owner listed below. Review related SOPs and chemical safety data sheets (SDS) before your training. Orientations are held weekly. Ebeam Lithography Sam Ebeam Evaporator Salam Sputter Salam RIE/ICP/DRIE Emma PECVD (Oxford) Rai ALD Rai Mask Aligner Shawn and Salam Nanoscribe 3D Lithography Rob and Shawn Stylus & Optical Profilometer Rai AFM Salam and Shawn FEI SEM Shawn Ellipsometer Rai Vapor HF/XeF2 Shawn Furnace Shawn Dicing Saw Shawn Wire Bonder Shawn Gold Sputter Coater Salam Plasma Asher Salam Photo and EBL Spinners Shawn and Salam UV Ozone Cleaner Shawn Acids and Caustics Hoods Emma Tool Training Staff Time $ / Hour: $ 35 (CUNY Rate), $ 50 (Outside Academic), $ 100 (Start-Up Companies), $ 150 (Industrial Companies)
