By The Center for Nanoscale Materials
Scanning electron microscopy and laser scanning confocal fluorescence microscopy JEOL 7500 Field-emission Scanning Electron Microscope provides high-resolution imaging utilizing backscattered or secondary electrons for nanometer-scale inspection. The microscope is capable of handling samples of various sizes, from small pieces to 150-mm-diameter wafers, and includes secondary and backscattered electron imaging capabilities, energy-dispersive X-ray fluorescence spectroscopy, and a transmitted electron detector. Image resolution using secondary electrons is less than 1 nm at 15 kV and less than 1.5 nm at 1 kV.
