By Asia Pacific Microsystems Inc.
Suitable for thermal isolation devices (Flow, Gas, Temperature, etc.) Layout design comes from customer. Fixed process (film stacking and thickness) but adjustable Pt thickness (≤ 2000A) Reliable adhesion layer for Pt to base film & passivation Proper film composition with stress balance Suspended diaphragm for high-temperature operation (heater > 650°C) Integration of Pt heater & RTD or thermopile temperature sensor Small sensing area, less than 1.0 mm 2
