By Jan Koum Center for Nanoscience and Nanotechnology, Tel Aviv University
Manufacturer and Model: KLA - P-17 Mechanical Stylus Profilometer The KLA P-17 Mechanical Profilometer is a high-precision stylus-based surface metrology system designed for advanced thin film measurement, step height analysis, surface roughness characterization, and stress measurement. The P-17 is part of KLA's industry-leading mechanical profilometer family, offering improved accuracy, automation capabilities, and repeatability compared to earlier models such as the P-6. It is ideal for semiconductor R&D, MEMS, microelectronics, materials science, and academic research laboratories. Common applications: The KLA P-17 is widely used for: - Photoresist thickness measurement - Thin film thickness measurement (metals, oxides, nitrides, polymers) - Etch depth characterization - MEMS structure profiling - Microfabrication process control - Surface roughness (Ra, Rq, Rt) analysis - Step height measurement in semiconductor devices - Wafer stress and bow measurement - Research in nanotechnology and advanced materials
