By KosarTech
Malfunction detection of deposition equipment and vacuum systems: the group’s experts are primed for malfunction detection of deposition devices including thermal spraying, plasma spraying, electrophoretic deposition (EPD), electroplating, molecular-beam epitaxy (MBE), chemical beam epitaxy (CBE), chemical vapor deposition (CVD, PECVD or PACVD), atomic layer deposition (ALD), physical vapor deposition (PVD) or thermal evaporation (TE and GLAD), electron-beam physical vapor deposition (EBPVD), ion plating, pulsed laser deposition (PLD), activated reactive evaporation (ARE), ionized cluster beam deposition (ICBD), and magnetron sputtering. In addition, they can fix the design flaws of vacuum systems and optimize the ultimate pressure of vacuum chambers by means of repairing the chamber leaks.
