Lithography

By Nanocenter

Lithography is the process where we illuminate a substrate coated with a photosensitive polymer (resist). When resist is selectively exposed to radiation it changes its physical properties and this change allows us to form structures. E-beam lithography enables us to illuminate structures with a resolution of a few nanometers and laser lithography with a resolution of 1 μm. We can produce nano and microstructures of any shape and patterns on flat surfaces. Lithography is used for: prototyping, electronics, microfluidics, optics, Lab-on-chip and much more. Minimum feature sizes depend on the employed method, choice of resist, and resist thickness. Versatile substrate materials: silicon, GaAs, glass, sapphire ceramics, polymers…