By CIC nanoGUNE
Nano and micro structure fabrication. Possibility to fabricate: - Micro and nano structures and devices on different substrates (glass, silicon, CaF 2). - Customized structured calibration and reference samples (microscopy, metrology). - Topographically changed surfaces with advanced properties (optical, mechanical, adhesion, friction). Interesting for: Materials science, microelectronics and semiconductors, automotive, laboratory test facilities, microscopy laboratories, machine-tool manufacturers, iron and steel industry... Tools used: Ion Beam Etcher (4Wave); E-beam lithography; Photolithography; Reactive Ion Etcher (RIE).
