Delivering an Automated Advantage for Our Customers Complex automation systems for semiconductor production require industry standard, clean, reliable interfaces for wafers, reticles, substrates and carriers. Brooks delivers interface automation that is critical to enable consistent operation, cleanliness, and supporting production at scale. Understanding High-Value Challenges for Interface Automation Ensuring reliable and clean transport of substrates in and out of highly complex semiconductor equipment is becoming a high-value problem as the demand for new technology puts pressure on industry standard specifications. Understanding and measuring variation in substrates before starting complex processes is critical for yield performance. Solving Critical Interface Automation Challenges Brooks reticle interface solutions are trusted worldwide on EUV lithography tools running today. Their reliability and cleanliness demonstrates what an effective automation interface should be – proven, consistent and trusted, to eliminate operational disruption. The demands for 200 mm, SMIF interface automation continues to be strong as the need for new power devices within EV vehicles and data centers require new technology. As customers need to improve yield and cost of 200 mm factories, Brooks provides proven interface solutions to the majority of equipment tools and the capability to engineer integration for new tools. Interface Automation Solutions Brooks delivers automation systems that support material handling, identification, and environmental control across semiconductor manufacturing operations. Improve Fab Operations Performance Connect with Brooks to improve system coordination, reduce variability, and support consistent semiconductor manufacturing operations.
