Achieve Unmatched Electrical Property Mapping at the Nanoscale Scanning Microwave Impedance Microscopy (sMIM) is a revolutionary AFM mode developed by PrimeNano and integrated with CSInstruments' Nano-Observer II. This cutting-edge technique offers high-quality images of local electrical properties with better than 50 nm resolution, utilizing microwave reflections from a nanoscale region directly under the sMIM probe. Key Features sMIM - Versatile Material Sensitivity: Accurately measure metals, semiconductors, insulators, and dielectrics - Direct Measurement: Conductivity (σ) and permittivity (ε) measured directly at the nanoscale - Linear Relationship: Ensures accurate data with a linear relationship to electrical properties - Quantitative Mapping: Capable of quantitative doping concentration mapping - Nano-Scale C-V Spectra: Offers detailed capacitance-voltage spectra at the nanoscale - Sub-Surface Sensing: Image structures beneath the sample surface Advanced Capabilities of sMIM - Unprecedented Sensitivity: Highest sensitivity for imaging challenging materials - Multiple Data Channels: Single scan provides six channels of data: sMIM-C: Capacitance/Permittivity variation sMIM-R: Resistivity/Conductivity variation dC/dV Amplitude: Carrier concentration dC/dV Phase: Carrier type (+/-) dR/dV Amplitude: Carrier concentration dR/dV Phase: Carrier type (+/-) - Minimal Sample Preparation: Reduces prep time, no need for conductive paths or current flow - Versatile Imaging Modes: Use in both contact and non-contact modes - User-Friendly Software: Easy scan management and configuration In this scan result, we analyze a sample of static random-access memory (sRAM) using Scanning Microwave Impedance Microscopy (sMIM) mode over a 13 micrometer area. The scan simultaneously captures topography and differential capacitance (dC/dV) signals. How does sMIM work? 1. Microwave Transmission: ScanWave™ sends microwaves to the probe tip via a fully shielded path 2. Near-Field Interaction: Microwaves create a near-field electromagnetic wave at the probe tip, interacting with the sample surface and subsurface 3. Signal Reflection: Reflected microwave power is processed by ScanWave™ electronics 4. Image Creation: Local electrical property variations cause changes in reflected microwaves, creating calibrated capacitive and resistive images Applications Where sMIM is used sMIM measures local electrical properties at length scales from tens of nanometres to microns, on conductors, semiconductors, dielectrics and insulators — even different classes of material in the same scan. Because no conductive path or current flow is needed, and buried structures can be sensed, it is used for: - Micro-electronics — devices such as SRAM, with differential capacitance (dC/dV) images (see the example above) - Doping profiles — carrier concentration and carrier type (+/−) from the dC/dV and dR/dV channels - Nano-materials and photonic materials and devices - Green energy and biomedical samples sMIM uses the ScanWave™ technology developed by PrimeNano, integrated with the CSInstruments AFM. Frequently Asked Questions What is scanning microwave impedance microscopy (sMIM)? sMIM is an AFM mode that sends microwaves to the probe tip through a fully shielded path. The near field at the tip interacts with the sample surface and subsurface, and the reflected microwaves are processed into calibrated capacitive (sMIM-C) and resistive (sMIM-R) images, recorded with the topography. What does sMIM measure? Permittivity and conductivity at the nanoscale. A single scan gives six channels: sMIM-C (capacitance / permittivity), sMIM-R (resistivity / conductivity), and the amplitude and phase of dC/dV and dR/dV, which give carrier concentration and carrier type (+/−). Does sMIM need a conductive path or a grounded sample? No. Unlike conductive AFM, sMIM does not need the sample to be in a conductive path or under current flow, nor the feature of interest to be exposed, so sample preparation is minimal. Can sMIM be used in tapping mode as well as contact mode? Yes. sMIM electrical measurements can be made in contact and in tapping (non-contact) imaging modes, and even during force-distance curves. Which mode is best depends on the sample; our application scientists can advise on yours. What is the resolution of sMIM? sMIM produces images of local electrical properties with better than 50 nm resolution. The sMIM probes are shielded MEMS devices with a 50 nm tip radius, which optimizes signal strength and resolution. Can sMIM see structures below the surface? Yes. Because of the long-range nature of the microwave near field, sMIM can image buried structures underneath the sample surface. Which materials can sMIM measure? Metals, semiconductors, insulators and dielectrics — different classes of material can be imaged in the same scan. Questions about sMIM? Ask the application scientists behind our AFMs and modes — about your samples, probes, set-up or which mode fits your measurement. We answer every message personally.
