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Helios 5 CX Ga-FIB

By The Center for Nanoscale Materials

Helios 5 CX Ga-FIB is dual beam system with Ga ion and electron beam. It is equipped with cryo-stage, EDS and EBSD detectors. It suitable for FIB-SEM 3D imaging and cross-sectional TEM sample preparation. Scientific Contact: Yuzi Liu