By Intelligent Enclosures Corp.
During the engineering phase iE provided Computational Fluid Dynamics analysis to ensure that the airflow would support a Class 1 environment for the stored Reticles, and that temperature rise inside the Stocker was within the specification. Once the design and engineering phase was complete, iE supported a rigorous system test in Japan before installing and certifying the first production unit in a semiconductor manufacturing Clean Room. Support is provided for continuous product improvement as the Customer’s technical requirements increase, and iE provides engineering and design services, and CFD analysis, to meet varying environmental requirements in the Fab. iE continues to produce this Air System for Daifuku and provides worldwide installation and certification support for semiconductor facilities.
