By ASRC Nanofabrication Facility
Electron Beam Lithography – 50keV Elionix ELS-G50 $ / Hour: $ 60 (CUNY Rate), $ 70 (Outside Academic), $ 210 (Start-Up Companies), $ 350 (Industrial Companies) Electron Beam Lithography – 100keV Elionix ELS-G100 $ / Hour: $ 60 (CUNY Rate), $ 70 (Outside Academic), $ 210 (Start-Up Companies), $ 350 (Industrial Companies) 3D Lithography (Nanoscribe Photonic Professional) Nanoscribe $ / Hour: $ 36 (CUNY Rate), $ 40 (Outside Academic), $ 120 (Start-Up Companies), $ 200 (Industrial Companies) Mask Aligner (EVG620) EV Group $ / Hour: $ 28 (CUNY Rate), $ 32 (Outside Academic), $ 96 (Start-Up Companies), $ 160 (Industrial Companies) Photo Resist Spinner Brewer Scientific $ / Hour: $ 21 (CUNY Rate), $ 24 (Outside Academic), $ 72 (Start-Up Companies), $ 120 (Industrial Companies) Ebeam Resist Spinner Brewer Scientific $ / Hour: $ 21 (CUNY Rate), $ 24 (Outside Academic), $ 72 (Start-Up Companies), $ 120 (Industrial Companies) Other Materials Spinner Brewer Scientific $ / Hour: $ 21 (CUNY Rate), $ 24 (Outside Academic), $ 72 (Start-Up Companies), $ 120 (Industrial Companies)
