By Department of Microtechnology and Nanoscience
Chalmers and MC2 have many years of experience and are extremely competent in the use of electron beam lithography. Chalmers is the clear leader in EBL in Scandinavia. Currently two EBL systems are in operation in the cleanroom, one JEOL JBX-9300FS and one Raith EBPG-5200, currently writing features down to 8 nm. EBL is one of the most popular processing services that the Laboratory provides to commercial and academic clients, patterning a wide variety of substrates for diverse applications.
