By Montana State University - Montana Microfabrication Facility (MMF)
Reflectometry is a method of metrology used to measure thin film thickness. Light is emitted from a source, transmitted through a thin film, and reflected back to a sensor. Based on the material and thickness of the film different wavelengths of light are transmitted with different intensities, due to the interference of light. This measurement is compared to a theoretical model to determine film thickness.
