Advanced wafer cleaning technology for eco-friendly production GreenTec Solutions combine sustainable, eco-friendly cleaning methods, modular flexibility, and in-situ UV technology to support demanding wafer-cleaning and surface-activation processes. With application-tailored green fluids, the CrustBuster in-situ UV module, and a hybrid process approach, GreenTec Solutions help reduce fab complexity while supporting reliable, KPI-driven production. Sustainable wafer cleaning for mid- to backend applications One platform. Hybrid approaches. SUSS GreenTec Solutions combine single-wafer and batch process capabilities with in-tool surface activation, enabling a broad range of process flows within one system.
