The Sigma 560 VP SEM is equipped with Zeiss’ in situ solution. The in situ solution features a Deben stage capable of applying both load and heat (specifications below) and Zeiss’ In Situ Lab software that integrates control of the microscope, Deben stage, and Oxford analytical detectors. Electron Beam - Accelerating Voltage: 0.02 kV to 30 kV - Probe Current: 3 pA to 100nA Resolution - 7 nm at 15 kV - 2 nm at 1 kV - 5 nm at 500 V - 5 nm at 30 kV (VP Mode) Detectors - SE Everhart-Thornley Detector - In-lens SE Detector - VPSE Detector - KARMEN high temperature BSE detector Stage - XY range: 130 mm - Z range: 50 mm - Tilt range: -4° to 70° - Rotation: 360° continuous Deben Stage - Force: 5000 N - Temperature Range: RT - 800°C - Flat sample jaws and 70° tilt jaws for EBSD Analytical Detectors - Oxford UltimMax 100mm 2 EDS Detector - Oxford Symmetry S3 EBSD Camera Location Hamerschlag Hall Function SEM Rates and materials - Rate type: Hourly - CMU (Internal): $65
