Electron beam resolution - At optimum WD - 0.7nm at 1 kV - At coincident Point - 0.6 nm at 15 kV - 1.2 nm at 1 kV Electron beam parameter space - Electron beam current range: 0.8 pA to 100 nA at all accelerating voltages - Accelerating voltage range: 350 V – 30 kV - Landing energy: 20* eV – 30 keV - Maximum horizontal field width: 2.3 mm at 4 mm WD Ion Optics High-performance PFIB column with unique Inductively Coupled Plasma (ICP) source supporting four ion species with fast switching capability - Ion species (primary ion beam): Xe, Ar, O, N - Switching time <10 minutes, only software operation - Ion beam current range: 1.5 pA to 2.5 µA - Accelerating voltage range: 500 V – 30 kV - Maximum horizontal field width: 0.9 mm at beam coincidence point Xe ion beam resolution at coincident point - <20 nm at 30 kV using preferred statistical method - <10 nm at 30 kV using selective edge method Detectors - Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE) - Everhart-Thornley SE detector (ETD) - IR camera for viewing sample/column - High-performance In-Chamber Electron and Ion Detector (ICE), for secondary ions (SI) and electrons (SE) - In-Chamber Thermo Scientific Nav-Cam™️ Sample Navigation Camera - Retractable low-voltage, high-contrast directional solid-state backscatter electron detector (DBS) - Integrated beam current measurement Analytical Detectors - EDAX Octane Elite Super EDS - EDAX Velocity Ultra EBSD Stage and Sample High-precision, five-axis motorized stage with Piezo-driven XYR axis - XY range: 150 mm - Z range: 10 mm - Rotation: 360° (endless) - Tilt range: -38° to +60° - XY repeatability: 1 μm - Max sample height: Clearance 55 mm to eucentric point - Max sample weight at 0° tilt: 500 g (including sample holder) - Max sample size: 150 mm with full rotation - Compucentric rotation and tilt Chamber - E- and I- beam coincidence point at analytical WD (4 mm SEM) - Ports: 21 - Inside width: 379 mm - Integrated plasma cleaner Location Roberts Hall Function SEM
