Without human intervention, a substrate makes its way from a parked location (in a load lock or within the chamber itself on a specialized stage) to the stage in the processing module, ready for the deposition process. Substrate transfer is achieved using an automated transfer arm. The movement of the arm is controlled using a closed-loop controller with a position feedback response (servomotor) that allows for precise control of position, velocity, and arm acceleration. Positioning and precision are carefully considered in the design and execu
