Location Roberts Hall Function SEM Contact Neal Lewis Rates and materials - Rate type: Hourly - CMU (Internal): $65 Specifications Resolution 1.2 nm at 30 kV; 2.3 nm at 3 kV. Detectors - SE Everhart Thornley Detector - Scintillator Backscatter Detector - Scanning Transmission Electron Microscopy (STEM) Detector - Oxford X-ACT EDS Detector Stage - X,Y = 80,60 mm - Z = 47 mm; 54 mm clearance with rotation stage / 81 mm without - T = - 80° to + 80° - R = 360° continuous - Repeatability: <1 μm (x and y) - Tilt-eucentric at 10 mm mounting height for all working distances - X and Y movements are in the tilt plane
