NW
Lithography & NanopatterningFabrication & Surface Engineering

Focused Ion Beam nanofabrication

By Istituto Nanoscienze

Nanofabrication by direct Focused Ion Beam (FIB) lithography through removal and/or deposition of material. (Figs. 1 and 2) Analysis of materials by a combination of FIB microsection and electron microscopy (SEM) (Fig. 3) FIB preparation of samples by transmission electron microscopy (TEM) (Fig. 4) DESCRIPTION OF RELATED RESEARCH Nanopatterning of TEM holograms on membranes (Fig. 1) Deposition and study of magnetic nanostructures (Fig. 2)