k-Space utilizes its world class metrology tools to offer in-house wafer and sample characterization. Our thin-film characterization tools can perform full wafer/sample maps of curvature, bow height, tilt, and absolute reflectivity at 660nm. Wafer Curvature, Bow Height, and Tilt Characterization - Standard Wafer Sizes: 2-inch, 3-inch, 100mm, 150mm, 200mm and 300mm. Wafers/samples must be mirror-like or near mirror-like surface quality (can see reflection in sample) - Custom sizes can be measured but may require machining of custom sample holder (quoted separately) - Scan Types: - line scan - Selectable area scan, up to full wafer with 5mm edge exclusion - Scan resolution: 1um - Maximum radius of curvature and bow height are sample size dependent. Full area scans can be performed on wafer diameters to 300mm if radius of curvature is >= 10m. - Curvature resolution:<= 2e-5 (1/m) - Bow height resolution:<= 0.01um - Tilt resolution:<= 0.01 arcsec
