In-situ Nanoindentation in the SEM

This document showcases the combination of a nanoindenter with an in-situ Atomic Force Microscope (AFM) inside a Scanning Electron Microscope (SEM). The application note explains how this correlative setup allows for the precise positioning of the indenter tip on a sample, performing the indentation to measure mechanical properties, and then immediately imaging the resulting indent with the AFM without breaking vacuum.