Rapid Probe Microscope

The Infinitesima Rapid Probe Microscope (RPM) is a modular scanning probe microscopy (SPM) system. It is designed for integration into other, larger systems ("host tools"), such as e-beam mask repair systems or wafer metrology platforms, for operation in either air or vacuum. The RPM is intended to provide hybrid metrology capabilities by combining its scanning probe technology with the host system's technology (e.g., e-beam). Its first commercial implementation is within the Zeiss MeRiT® neXT mask repair system.