Evactron® E50 Plasma De-Contaminator™
C25
The Evactron E50 Plasma De-contaminator was designed to remove hydrocarbon contamination from vacuum chambers such as SEMs, FIBs, TEMs, XPS and semiconductor equipment including CD-SEMs, ALD and EUVL. Its compact design fits all models of FIB/SEM chambers and loadlocks to provide in-situ sample cleaning. Evactron plasma cleaning shortens pumpdown time, maintains the ultimate vacuum level of your system and increases sample throughput with powerful yet thorough contamination removal.
Evactron E50 System Specifications:
Remote hollow cathode plasma radical source
Desktop controller with pushbutton operation
Android tablet with Bluetooth communication
Library of tested recipes and options to change power, cycles, length of cleaning, etc.
Chassis dimensions WxHxD: 17” x 3.4” x 6.7” (43 cm x 8.6 cm x 17 cm)
RF Power: 35 – 75 Watts at 13.56 MHz RFHC
100-240 VAC 50/60 HZ input
RoHS, CE, NRTL, TUV and SEMI S2 compliant