Vista 300
C16
The Vista 300 is a highly advanced nano-chemical metrology instrument designed for research & development and failure analysis in nanofabrication. It is based on Photo-induced Force Microscopy (PiFM) and PiF-IR spectroscopy.
This instrument combines Atomic Force Microscopy (AFM) functionality with chemical identification capabilities at the nanoscale. Key features and functionalities include:
- Imaging Modes: Non-contact AFM, PiFM, KPFM (Kelvin Probe Force Microscopy), cAFM, nano DMA (Dynamic Mechanical Analysis), and Force vs. Distance (FvD) mapping.
- Spectroscopy Modes: PiF-IR (Photo-induced Force Infrared Spectroscopy) and FvD.
- Automation: Features like AutoPiFM and automatic alignment simplify data generation and operation.
- Sample Size: It supports a large sample stage travel of 300 mm x 300 mm.