By Integrated Dynamics Engineering GmbH
Passive Vibration Isolation Modules - Rugged design with up to 40,000 lb payload capacity per isolator - Industry standard for heavy platform isolation - Clean room compatible - Adjustable damping capability - Sub 1 Hz natural frequency
Payload up to several tons Extremely accurate horizontal & vertical motion range Cleanroom class ISO 1 Vacuum tool compatible Tool integrated w/o footprint increase
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Active Vibration Platform - Sandwich style isolation platform - Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances - Compact design with integrated controller enables easy installation and tuning - Ultra-fast settling time - Stage and floor feed-forward options
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Sandwich style isolation platform Hybrid design incorporates stiff steel springs providing excellent performance at higher frequency disturbances Compact design with integrated controller enables easy installation and tuning Ultra-fast settling time Stage and floor feed-forward options
CATEGORY
